Leach, R K; Jones, C W; Sherlock, B; Krysinski, A* (2013) Metrology challenges for highly parallel micro-manufacture. In: 4M 2013 - Proceedings of the 10th International Conference on Multi-Material Micro Manufacture., 8-10 October 2013, San Sebastian, Spain.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Identification number/DOI:	10.3850/978-981-07-7247-5_432
Last Modified:	02 Feb 2018 13:14
URI:	https://eprintspublications.npl.co.uk/id/eprint/5933