Giusca, C L; Leach, R K (2013) Calibration of the scales of areal surface topography measuring instruments: Part 3 Resolution. Meas. Sci. Technol., 24 (10). 105010

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Abstract

A novel method for determining the lateral resolution of areal surface topography measuring instruments is presented. The method is based on the definition of the lateral period limit and uses a type ASP (star-shaped) material measure. A coherence scanning interferometer has been used as a test case.

Item Type:	Article
Keywords:	optical resolution, uncertainty, surface texture
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Identification number/DOI:	10.1088/0957-0233/24/10/105010
Last Modified:	02 Feb 2018 13:14
URI:	https://eprintspublications.npl.co.uk/id/eprint/5926