Leach, R K; Giusca, C L (2012) Determination of the metrological characteristics of optical areal surface topography measuring instruments. Proc. SPIE - Int. Soc. Opt. Eng., 8430. 84300Q

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Item Type:	Article
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Identification number/DOI:	10.1117/12.921452
Last Modified:	02 Feb 2018 13:14
URI:	https://eprintspublications.npl.co.uk/id/eprint/5453