Claverley, J D; Sheu, D-Y*; Burisch, A*; Leach, R K; Raatz, A* (2011) Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. In: IEEE International Symposium on Assembly and Manufacturing (ISAM) 2011, 25-27 May 2011.

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Abstract

In this paper the assembly of a novel micro-scale co-ordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Keywords:	MEMS, micro-assembly, prototyping, semi-automation, desktop factory
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Identification number/DOI:	10.1109/ISAM.2011.5942327
Last Modified:	02 Feb 2018 13:14
URI:	https://eprintspublications.npl.co.uk/id/eprint/5232