Yacoot, A; Leach, R K; Hughes, B; Giusca, C; Jones, C W; Wilson, A (2009) Dimensional nanometrology at The National Physical Laboratory. Proc. SPIE - Int. Soc. Opt. Eng., 7133. pp. 713345-1.

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Abstract

The growth in nanotechnology has led to an increased requirement for traceable dimensional measurements of nanometre-sized objects and micrometre-sized objects with nanometre tolerances. To meet this challenge NPL has developed both purpose built instrumentation and metrology for commercially available equipment. This paper describes the development and use of a selection of these instruments that include, atomic force microscopy, x-ray interferometry, a low force balance, a micro coordinate measuring machine and areal surface texture measuring instrument.

Item Type:	Article
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:15
URI:	https://eprintspublications.npl.co.uk/id/eprint/4442