Yacoot, A; Koenders, L* (2003) From nanometre to millimetre: a feasibility study of the combination of scanning probe microscopy and combined optical and X-ray interferometry. Meas. Sci. Technol., 14 (9). N59-N63

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Abstract

This feasibility study considers the potential combination of an x-ray interferometer and optical interferometer as a one dimensional long range high resolution scanning stage for an atomic force microscope (AFM) in order to overcome the problems on non-linearity associated with conventional AFMs and interferometers. Preliminary results of measurements of the uniformity of the period of a grating used as a transfer standards show variations in period at the nanometre level.

Item Type:	Article
Keywords:	nanmetrology, calibration, scanning probe microscopy
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:17
URI:	https://eprintspublications.npl.co.uk/id/eprint/2992