Lee-Bennett, I*; Leach, R K (2004) Metrology for microsystems - characterisation of a new broadband interferometer. In: 4th euspen International Conference, 31 May 2004 - 2 June 2004, Glasgow, UK.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:16
URI:	https://eprintspublications.npl.co.uk/id/eprint/2943