Lee-Bennett, I*; Leach, R K (2004) Metrology for microsystems - characterisation of a new broadband interferometer. In: 4th euspen International Conference, 31 May 2004 - 2 June 2004, Glasgow, UK.
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Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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Subjects: | Engineering Measurements Engineering Measurements > Dimensional |
Last Modified: | 02 Feb 2018 13:16 |
URI: | http://eprintspublications.npl.co.uk/id/eprint/2943 |
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