Leach, R K (2007) A new tactile probe based on differential interferometry for use in areal surface texture measurement. In: 7th International Conference and 9th Annual General Meeting of the European Society for Precision Engineering and Nanotechnology, 20-24 May 2007, Bremen, Germany.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Subjects:	Nanoscience Nanoscience > Surface and Nanoanalysis
Last Modified:	02 Feb 2018 13:15
URI:	https://eprintspublications.npl.co.uk/id/eprint/3894