Hedley, J*; Burdess, J S*; Harris, A J*; Gallacher, B J*; McNeil, C J*; Cumpson, P J; Enderling, S* (2004) An optical workstation for characterisation and modification of MEMS. Proc. SPIE - Int. Soc. Opt. Eng., 5458. pp. 244-252.

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Abstract

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Item Type:	Article
Subjects:	Nanoscience
Last Modified:	02 Feb 2018 13:16
URI:	https://eprintspublications.npl.co.uk/id/eprint/3386