Seah, M P (2005) An accurate semi-empirical equation for sputtering yields, II: for neon, argon and xenon ions. Nucl. Instrum. Methods Phys. Res. B, Beam Interact. Mater. At., 229 (3-4). pp. 348-358.

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Item Type:	Article
Keywords:	sputter-depth profiling
Subjects:	Nanoscience Nanoscience > Surface and Nanoanalysis
Last Modified:	02 Feb 2018 13:16
URI:	https://eprintspublications.npl.co.uk/id/eprint/3364