Haycocks, J (2002) An uncertsinty budjet for the Metrological Atomic Force Microscope. NPL Report. CBTLM 24

Text CBTLM24.pdf Download (1MB)

Abstract

The Metrological Atomic Force Microscope uses interferometry in three axes to deliver traceable dimensional measurements of standard samples. This report records the sources of uncertainty associated with the instrument, gives estimated values of these uncertainties and presents outline and example calculations of the combined measurement uncertainty for specific dimensional measurements of surface features. The uncertainty calculations follow the internationally accepted guidelines laid out in the Guide to the Expression of Uncertainty in Measurement.

Item Type:	Report/Guide (NPL Report)
NPL Report No.:	CBTLM 24
Subjects:	Nanoscience Nanoscience > Nano-Dimensional
Last Modified:	02 Feb 2018 13:17
URI:	https://eprintspublications.npl.co.uk/id/eprint/2469