Hanham, S M; Buchholz, J-H; Fischer, H; Gollor, U; Lehmke, J; Wischmann, W; Lia, E; Walter, B; Bavedila, F; Faucher, M; Gregory, A; Jensen, L; Follmann, R (2024) Low Dielectric Filling Factor Millimeter-wave Photonic Crystal Resonator Micromachined from NTD High-Resistivity Silicon. IEEE Transactions on Microwave Theory and Techniques, 72 (11). pp. 6601-6612.

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Abstract

This paper presents two millimeter-wave electromagnetic bandgap (EBG) resonators, commonly referred to as photonic crystal resonators (PCRs), designed for use in an ultra-low phase noise MMIC oscillator. The 2D slab PCRs are fabricated using bulk micromachining of high resistivity silicon (HRS) which has been neutron transmutation doped (NTD) leading to a factor of two improvement in quality (Q-) factor over non-irradiated HRS. A novel low filling factor (LFF) PCR design is introduced where the dielectric filling factor of the resonant field is engineered to be 47% leading to a factor of two improvement in unloaded Q-factor (122,000 at 297 K) and resonant frequency temperature sensitivity (21 ppm/K) over a conventional L5 PCR design with measured unloaded Q-factor of 74,000 and temperature sensitivity 46 ppm/K. Additionally, it is shown that unloaded Q-factors in excess of 200,000 are achievable with both resonator designs when the temperature is reduced to below 274 K. Both resonators benefit from a planar geometry, integrated waveguides and fabrication using a mature silicon micromachining technique.

Item Type:	Article
Keywords:	Photonic crystal resonator, Q-factor
Subjects:	Electromagnetics > Electromagnetic Materials
Divisions:	Electromagnetic & Electrochemical Technologies
Identification number/DOI:	10.1109/TMTT.2024.3396631
Last Modified:	27 Feb 2025 14:31
URI:	https://eprintspublications.npl.co.uk/id/eprint/10121