Sun, X Z; Heaps, E; Yacoot, A; Yang, Q P; Grolich, P; Klapetek, P (2021) Three-dimensional drift correction of scan data from atomic force microscopy using Lissajous scanning paths. Measurement Science and Technology, 32 (11). 115010

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Item Type:	Article
Subjects:	Engineering Measurements > Dimensional
Divisions:	Engineering
Identification number/DOI:	10.1088/1361-6501/ac100f
Last Modified:	20 Apr 2022 13:44
URI:	https://eprintspublications.npl.co.uk/id/eprint/9418