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Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

Klapetek, P; Yacoot, A; Hortvík, V; Duchoň, V; Dongmo, H; Řeřucha, Š; Valtr, M; Nečas, D (2020) Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy. Measurement Science and Technology, 31 (9). 094001 ISSN 0957-0233

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Abstract

Atomic force microscopy (AFM) often relies on the assumption that cantilever bending can be described by a simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrological instruments use free space or fibre interferometers for measuring the position of cantilever apex directly, thereby simplifying the metrology traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due to lateral forces acting during different AFM measurement regimes is presented in this paper. It is based on using a set of closely packed fibre interferometers that can be used to determine localised bending of the cantilever at different positions along the cantilever. This can be used for detection of cantilever deformation beyond the classical beam theory and can yield both better understanding of uncertainty sources in individual AFM force-distance measurements and more accurate scanning in the constant height mode in high-speed AFM applications.

Item Type: Article
Keywords: AFM, Nano, fibre, cantilever
Subjects: Engineering Measurements > Dimensional
Divisions: Engineering
Identification number/DOI: 10.1088/1361-6501/ab85d8
Last Modified: 15 Oct 2020 10:08
URI: http://eprintspublications.npl.co.uk/id/eprint/8899

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