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Bringing real-time traceability to high-speed atomic force microscopy

Heaps, E; Yacoot, A; Dongmo, H; Picco, L; Payton, O D; Russell-Pavier, F; Klapetek, P (2020) Bringing real-time traceability to high-speed atomic force microscopy. Measurement Science and Technology, 31 (7). 074005 ISSN 0957-0233

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In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently, these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short range video rate images and large area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.

Item Type: Article
Keywords: Metrology, high-speed atomic force microscopy, traceability, nanometrol-ogy, nanotechnology
Subjects: Engineering Measurements > Dimensional
Divisions: Engineering
Identification number/DOI: 10.1088/1361-6501/ab7ca9
Last Modified: 06 Jul 2020 14:57
URI: http://eprintspublications.npl.co.uk/id/eprint/8785

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