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Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution

Li, Z; Brand, U; Wolff, H; Koenders, L; Yacoot, A; Puranto, P (2017) Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution. Proceedings of SPIE, 10329. 1032944

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A traceable calibration setup for investigation of the quasi-static and the dynamic performance of nano-positioning stages is detailed, which utilizes a differential plane-mirror interferometer with double-pass configuration from the National Physical Laboratory (NPL). An NPL-developed FPGA-based interferometric data acquisition and decoding system has been used to enable traceable quasi-static calibration of nano-positioning stages with high resolution. A lock-in based modulation technique is further introduced to quantitatively calibrate the dynamic response of moving stages with a bandwidth up to 100 kHz and a picometer resolution. First experimental results have proven that the calibration setup can achieve under nearly open-air conditions a noise floor lower than 10 pm/sqrt(Hz). A pico-positioning stage, which that is used for nanoindentation with indentation depths down to a few picometers, has been characterized with this calibration setup.

Item Type: Article
Subjects: Engineering Measurements > Dimensional
Divisions: Engineering, Materials & Electrical Science
Identification number/DOI: 10.1117/12.2270262
Last Modified: 12 Feb 2018 15:21
URI: http://eprintspublications.npl.co.uk/id/eprint/7700

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