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Gwyscan: a library to support non-equidistant scanning probe microscope measurements.

Klapetek, P*; Yacoot, A; Grolich, P*; Valtr, M*; Necas, D* (2017) Gwyscan: a library to support non-equidistant scanning probe microscope measurements. Meas. Sci. Technol., 28 (3). 034015

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In this contribution we present a tool for enabling easy integration of adaptive step scanning
techniques into a metrological scanning probe microscope. Scanning with adaptive steps can reduce the amount of data collected in SPM measurements thereby leading to faster data acquisition, a smaller amount of data collection required for a specific analytical task and less sensitivity to mechanical and thermal drift.

Implementation of adaptive scanning routines into a custom built microscope is not an easy task: regular data are much easier to handle for previewing (e.g. levelling) and storage. There is also almost no support for this type of data in SPM data processing packages and no consideration has been given to this in the ISO corresponding standards for example ISO 5436 for step height evaluation or ISO 25178 for surface roughness parameters determination.
We present an environment to make adaptive scanning easier to be implemented for an instrument developer, specifically taking into account data acquisition approaches that are used by National Metrology Institutes. This includes a library with algorithms written in C and LabView for handling data storage, regular mesh preview generation and planning the scan path on basis of different assumptions or normative documents. A set of modules for Gwyddion open source software for handling these data and for analysis of surface parameters is presented. Using this combination of data acquisition and processing tools one can implement adaptive scanning in a relatively easy way into an instrument that was previously measuring on a regular grid.

The performance of the presented approach will be shown on standard samples such as steps or gratings and on typical industrial samples. The achievable increase in measurement speed will be discussed and uncertainties related to the more complicated scanning path will be presented.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Mass, Force, Pressure
Identification number/DOI: 10.1088/1361-6501/28/3/034015
Last Modified: 02 Feb 2018 13:12
URI: http://eprintspublications.npl.co.uk/id/eprint/7381

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