Giusca, C L; Leach, R K (2013) Calibration of the metrological characteristics of Coherence Scanning Interferometers (CSI) and Phase Shifting Interferometers (PSI). Measurement Good Practice Guide. 127

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Abstract

This document is a guide to the calibration of Coherence Scanning Interferometers (CSI) and Phase Shifting Interferometers (PSI). Methods for determining the measurement noise, flatness deviation, amplification coefficient, linearity and perpendicularity of the axes and resolution of areal surface topography measuring instruments are presented.

Item Type:	Report/Guide (Measurement Good Practice Guide)
Notes:	NPL made every effort to ensure all information contained in this Good Practice Guide was correct at time of publication. NPL is not responsible for any errors, omissions or obsolescence, and does not accept any liability arising from the use of these Good Practice Guides.
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	20 Feb 2026 14:19
URI:	https://eprintspublications.npl.co.uk/id/eprint/5820