Yacoot, A; Kuetgens, U* (2012) Sub-atomic dimensional metrology: developments in the control of x-ray interferometers. Meas. Sci. Technol., 23 (7). 074003

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Abstract

Within the European Metrology Research Programme funded project NANOTRACE, the non-linearity of the next generation of optical interferometers has been measured using x-ray interferometry. The x-ray interferometer can be regarded as a ruler or translation stage whose graduations or displacement steps are based on the lattice spacing of the crystallographic planes from which the x-rays are diffracted: in this case the graduations are every 192 pm corresponding to the spacing between the (220) planes in silicon. Precise displacement of the x-ray interferometer's monolithic translation stage in steps corresponding to discrete numbers of x-ray fringes requires servo positioning capability at the picometre level. To achieve this very fine control, a digital control system has been developed which has opened up the potential for advances in metrology using x-ray interferometry that include quadrature counting of x-ray fringes.

Item Type:	Article
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Identification number/DOI:	10.1088/0957-0233/23/7/074003
Last Modified:	02 Feb 2018 13:14
URI:	http://eprintspublications.npl.co.uk/id/eprint/5475

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