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Recent developments in dimensional metrology using AFMs.

Yacoot, A; Koenders, L* (2011) Recent developments in dimensional metrology using AFMs. Meas. Sci. Technol., 22 (12). 122001

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Scanning probe microscopes, in particular the atomic force microscope (AFM), have developed into sophisticated instruments that, throughout the world, are no longer used just for imaging, but for quantitative measurements. A role of the national measurement institutes has been to provide traceable metrology for these instruments. This article presents a brief overview as to how this has been achieved, highlights the future requirements for metrology to support developments in AFM technology and describes work in progress to meet this need.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1088/0957-0233/22/12/122001
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5372

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