Petzing, J*; Coupland, J*; Leach, R K (2010) The measurement of rough surface topography using coherence scanning interferometry. Measurement Good Practice Guide. 116

Text (Measurement Good Practice Guide No. 116) mgpg116.pdf - Published Version Download (9MB)

Abstract

This guide describes good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry). It is aimed at users of coherence scanning interferometry for the optical measurement of surface texture within production and research environments. The general guidelines described herein can be applied to the measurement of rough surfaces exhibiting different types of surface topography. For the purpose of this guide, the definition of a rough surface is one that has features with heights ranging from approximately 10 nm to less than 100 µm

Item Type:	Report/Guide (Measurement Good Practice Guide)
Notes:	NPL made every effort to ensure all information contained in this Good Practice Guide was correct at time of publication. NPL is not responsible for any errors, omissions or obsolescence, and does not accept any liability arising from the use of these Good Practice Guides.
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	20 Feb 2026 14:57
URI:	https://eprintspublications.npl.co.uk/id/eprint/4833