Wilson, A; Leach, R K (2009) Manufacturing and testing of a micro-stylus suitable for tactile probing in dimensional metrology. NPL Report. ENG 15

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Abstract

This report presents work carried out during the initial phase of an on-going National Measurement System project aimed at developing a new micro-probe system capable of making dimensional measurements on components with micro-scale features. The report describes the work carried out in the design, manufacture and testing of one constituent element of the micro-probe system - the micro-stylus component.
Two techniques were investigated for the manufacture of suitable micro-styli - wire electro-discharge machining and one pulse electro-discharge manufacturing. Several prototype styli were produced using each technique and the quality of the manufactured components assessed visually with a Scanning Electron Microscope. In order to assess the functional performance of the styli a number of the manufactured components were incorporated into contact probe sensor elements compatible for use with a high accuracy co-ordinate measuring machine. One of these hybrid probes was used to perform a series of measurements on a set of reference artefacts, with the resulting measurement data analysed to evaluate the suitability of the micro-stylus for use in contact probing applications.

Item Type:	Report/Guide (NPL Report)
NPL Report No.:	ENG 15
Keywords:	micro-probe, co-ordinate metrology
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:15
URI:	http://eprintspublications.npl.co.uk/id/eprint/4511

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