Leach, R K; Giusca, C (2009) Results from a comparison of optical thin film thickness measurement. NPL Report. ENG 18

Text ENG18.pdf Download (294kB)

Abstract

In this report we present the results of a comparison of non-contact methods for measuring the thickness of thin film artefacts. Only well-controlled calibration artefacts have been measured to assess the base-line measurement capability of instruments used in industry. With the exception of those from one instrument, the results show agreement between the methods, and with the calibrated values, to within 2 % of the nominal height.

Item Type:	Report/Guide (NPL Report)
NPL Report No.:	ENG 18
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:15
URI:	https://eprintspublications.npl.co.uk/id/eprint/4460