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Measurement of structured surfaces using stylus AFM and optical methods.

Gao, F*; Petzing, J N*; Coupland, J M*; Leach, R K (2007) Measurement of structured surfaces using stylus AFM and optical methods. In: 7th International Conference and 9th Annual General Meeting of the European Society for Precision Engineering and Nanotechnology, 17-20 July 2007, Huddersfield, UK.

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The measurement of surface structure is increasingly important for the characterisation of components such as optical elements, micro-fluidic devices and micro-electro-mechanical system products. Traditionally, surface characterisation has been carried out using stylus-based instrumentation. More recently, surface scanning profilometry, such as atomic force microscopy, scanning near field optical microscopy, scanning white light interferometry and confocal microscopy, have become increasingly popular. In this paper we report a series of comparisons on sinusoidal and square wave artefacts using vertical scanning white-light interferometry, confocal microscopy, atomic force microscopy and stylus-based instrumentation. The results show variation between instruments and highlight some of the limitations that could affect the traceability of results.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Keywords: surface measurement, white light interferometry, confocal microscoipy, stylus
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/3933

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