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Analysis of the MEMSTAND survey on standardisation for microsystems technology.

Singleton, L*; Leach, R K; Cui, Z* (2003) Analysis of the MEMSTAND survey on standardisation for microsystems technology. In: Proceedings of the International Seminar MEMSTAND - "Standardisation for Microsystems: the Way Forward"., 24-26 February 2003, Barcelona, Spain.

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This paper presents the results of a survey undertaken for the European Framework 5 project MEMSTAND. The focus of this project is to establish a roadmap for the pre-normative standardisation research effort in Europe. This roadmap is necessary because firstly, many standardisation issues still remain open in microsystems technologies, and secondly, a concerted, cohesive effort is required to provide solutions for these open issues. As part of the project workplan, a survey of the existing use of standards in industry/academia has been undertaken, which is the focus of this paper.
The survey quantifies the existing use of standardised devices in MST products and the importance of standardisation. In addition, the level of standardisation in design, manufacturing, packaging and metrology is researched. The survey has also determined the existing awareness of standardisation in the development of a new product. The survey has been directed at companies, who supply MST products, concentrating on the product volume, input/output issues, electronic devices, the sensor interface, whether chemical, optical, electrical, and mechanical, as well as technology specific issues such as wafer handling, wafer processing, alignment issues, wafer bonding, planarisation, metallisation and electroplating.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/2553

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