We use cookies to ensure that we give you the best experience on our website Learn more
Jiang, L D*; Lewis, G*; Spearing, S M*; Jennett, N M; Monclus, M (2010) Development of a low temperature amorphous Si/Ti for integrated MEMS/NEMS. Microelectron. Eng., 87 (5-8). pp. 1259-1262.