Article

Seah, M P; Mulcahy, C P A*; Biswas, S* (2010) Non-linearities in depth profiling nanometre layers. J. Vac. Sci. Technol. B, 28 (6). pp. 1215-1221.

Seah, M P; Spencer, S J; Bensebaa, F*; Vickridge, I*; Danzebrink, H*; Krumrey, M*; Gross, T*; Oesterle, W*; Wendler, E*; Rheinlander, B*; Azuma, Y*; Kojima, I*; Suzuki, N*; Suzuki, M*; Tanuma, S*; Moon, D W*; Lee, H J*; Hyun Mo Cho*,; Chen, H Y*; Wee, A T S*; Osipowicz, T*; Pan, J S*; Jordaan, W A*; Hauert, R*; Klotz, U*; van der Marel, C*; Verheijen, M*; Tamminga, Y*; Jeynes, C*; Baily, P*; Biswas, S*; Falke, U*; Nguyen, N V*; Chandler-Horowitz, D*; Ehrstein, J R*; Muller, D*; Dura, J A* (2004) Critical review of the current status of thickness measurements for ultrathin SiO2 on Si Part V: results of a CCQM pilot study. Surf. Interface Anal., 36 (9). pp. 1269-1303.

Seah, M P; Spencer, S J; Bensebaa, F*; Vickridge, I*; Danzebrink, H*; Krumrey, M*; Gross, T*; Oesterle, W*; Wendler, E*; Rheinländer, B*; Azuma, Y*; Kojima, I*; Suzuki, N*; Suzuki, M*; Tanuma, S*; Moon, D W*; Lee, H J*; Hyan Mo Cho*,; Chen, H Y*; Wee, A T S*; Osipowicz, T*; Pan, J S*; Jordaan, W A*; Hauert, R*; Klotz, U*; van der Marel, C*; Verheijen, M*; Tamminga, Y*; Jeynes, C*; Bailey, P*; Biswas, S*; Falke, U*; Nguyen, N V*; Chandler-Horowitz, D*; Ehrstein, J R*; Muller, D*; Dura, J A* (2004) Critical review of the current status of thickness measurements for ultrathin SiO2 on Si Part V: results of a CCQM pilot study. Surf. Interface Anal., 36. pp. 1269-1303.