Wooldridge, J; Blackburn, J; Muniz-Piniella, A; Stewart, M; Shean, T A V; Weaver, P M; Cain, M G (2013) Finite element analysis of the vertical levitation force in an electrostatic MEMS comb drive actuator. J. Phys.: Conf. Ser., 472. 012002

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Item Type:	Article
Subjects:	Advanced Materials Advanced Materials > Functional Materials
Identification number/DOI:	10.1088/1742-6596/472/1/012002
Last Modified:	02 Feb 2018 13:14
URI:	https://eprintspublications.npl.co.uk/id/eprint/6049