Tong, V; Mingard, K P (2023) Uncertainties in scanning electron microscopy - dimensional measurement calibration and angular measurement with EBSD. NPL Report. MAT 125
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Text (NPL Report MAT 125)
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Official URL: https://doi.org/10.47120/npl.MAT125
Abstract
This report illustrates the typical variability in the accuracy of dimensional measurements made to verify SEM calibrations that may be expected from operation of a range of different microscopes operating over a wide range of conditions. It shows the application of the measurement of dimensional errors in verifying the accuracy of gold nanoparticle size distributions and the determination of the uncertainty in these distributions.
Item Type: | Report/Guide (NPL Report) |
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NPL Report No.: | MAT 125 |
Subjects: | Advanced Materials > Microstructural Characterisation |
Divisions: | Materials and Mechanical Metrology |
Identification number/DOI: | 10.47120/npl.MAT125 |
Last Modified: | 10 Apr 2024 10:39 |
URI: | http://eprintspublications.npl.co.uk/id/eprint/9959 |
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