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Uncertainties in scanning electron microscopy - dimensional measurement calibration and angular measurement with EBSD

Tong, V; Mingard, K P (2023) Uncertainties in scanning electron microscopy - dimensional measurement calibration and angular measurement with EBSD. NPL Report. MAT 125

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Abstract

This report illustrates the typical variability in the accuracy of dimensional measurements made to verify SEM calibrations that may be expected from operation of a range of different microscopes operating over a wide range of conditions. It shows the application of the measurement of dimensional errors in verifying the accuracy of gold nanoparticle size distributions and the determination of the uncertainty in these distributions.

Item Type: Report/Guide (NPL Report)
NPL Report No.: MAT 125
Subjects: Advanced Materials > Microstructural Characterisation
Divisions: Materials and Mechanical Metrology
Identification number/DOI: 10.47120/npl.MAT125
Last Modified: 10 Apr 2024 10:39
URI: http://eprintspublications.npl.co.uk/id/eprint/9959

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