Skinner, J; Campion, J; Ridler, N M (2023) Comparison of TRL Calibration Standards and Techniques for Waveguide S-parameter Measurements up to Terahertz Frequencies. In: 2023 53rd European Microwave Conference (EcMC), 19-21 September 2023, Berlin, Germany.

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Abstract

This paper describes a comparison of measurements used to evaluate the effectiveness of different implementations of the Thru-Reflect-Line (TRL) calibration scheme specially developed for S-parameter measurements in waveguides used up to terahertz frequencies. A WM-380 (500-750 GHz) vector network analyser (VNA) was calibrated using a ¼-wave TRL technique utilising novel silicon micromachined standards, and this was benchmarked against a ¾-wave TRL technique utilising conventionally manufactured standards. The calibrations were applied to measurements of a set of devices with a broad range of characteristics. The results from each scheme were then compared, both directly and against reference values of various kinds. The comparison results give a clear indication of the viability of each calibration scheme and each set of standards for providing accurate measurements at these frequencies.

Item Type:	Conference or Workshop Item (Paper)
Keywords:	S-parameters, VNA, terahertz waveguide, metrology, calibration
Subjects:	Electromagnetics > Terahertz
Divisions:	Electromagnetic & Electrochemical Technologies
Identification number/DOI:	10.23919/EuMC58039.2023.10290496
Last Modified:	08 Jan 2024 14:09
URI:	https://eprintspublications.npl.co.uk/id/eprint/9891