Bridges, A; Yacoot, A; Kissinger, T; Tatam, R P (2022) Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities. Measurement Science and Technology, 33 (2). 025201

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Abstract

Displacement measuring interferometers, commonly employed for traceable measurements at the nanoscale, suffer from non-linearities in the measured displacement that limit the achievable measurement uncertainty for microscopic displacements. Two closely related novel non-linearity correction methodologies are presented here that allow for the correction of non-linearities in cases where the displacement covers much less than a full optical fringe. Both corrections have been shown, under ideal conditions, to be capable of reducing all residual non-linearity harmonics to below the 10 pm level.

Item Type:	Article
Keywords:	interferometry, non-linearity, dimensional metrology
Subjects:	Nanoscience > Nano-Dimensional
Divisions:	Engineering
Identification number/DOI:	10.1088/1361-6501/ac3aad
Last Modified:	12 Jan 2022 15:15
URI:	https://eprintspublications.npl.co.uk/id/eprint/9313