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Method for Molecular Layer Deposition Using Gas Cluster Ion Beam Sputtering with Example Application In Situ Matrix-Enhanced Secondary Ion Mass Spectrometry

Lorenz, M; Zhang, J; Shard, A G; Vorng, J L; Rakowska, P D; Gilmore, I S (2021) Method for Molecular Layer Deposition Using Gas Cluster Ion Beam Sputtering with Example Application In Situ Matrix-Enhanced Secondary Ion Mass Spectrometry. Analytical Chemistry, 93 (7). pp. 3436-3444. ISSN 0003-2700

Full text not available from this repository.
Item Type: Article
Subjects: Nanoscience > Surface and Nanoanalysis
Divisions: Chemical & Biological Sciences
Identification number/DOI: 10.1021/acs.analchem.0c04680
Last Modified: 28 May 2021 13:12
URI: http://eprintspublications.npl.co.uk/id/eprint/9163

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