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Practical guides for x-ray photoelectron spectroscopy: Quantitative XPS

Shard, A G (2020) Practical guides for x-ray photoelectron spectroscopy: Quantitative XPS. Journal of Vacuum Science & Technology A, 38 (4). 041201 ISSN 0734-2101

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X-ray photoelectron spectroscopy is widely used to identify chemical species at a surface through the observation of peak positions and peak shapes. It is less widely recognized that intensities in XPS spectra can also be used to obtain information on the chemical composition of the surface of the sample and the depth distribution of chemical species. Transforming XPS data into meaningful information on the concentration and distribution of chemical species is the topic of this article. In principle the process is straightforward, but there are a number of pitfalls that must be avoided to ensure that the information is representative and as accurate as possible. This chapter sets out the things that should be considered to obtain reliable, meaningful and useful information from quantitative XPS. This includes the necessity for reference data, instrument performance checks and a consistent and methodical method for the separation of inelastic background from peaks. The chapter contains relevant and simple equations along with guidance on their use, validity and assumptions.

Item Type: Article
Subjects: Nanoscience > Surface and Nanoanalysis
Divisions: Chemical & Biological Sciences
Identification number/DOI: 10.1116/1.5141395
Last Modified: 16 Oct 2020 10:26
URI: http://eprintspublications.npl.co.uk/id/eprint/8908

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