Linzen, S*; Ziegler, M*; Astafiev, O V; Schmelz, M*; Hubner, U*; Diegel, M*; Il'ichev, E*; Meyer, H G* (2017) Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition. Supercond. Sci. Technol., 30 (3). 035010

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Abstract

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Item Type:	Article
Subjects:	Quantum Phenomena Quantum Phenomena > Nanophysics
Divisions:	Quantum Science
Identification number/DOI:	10.1088/1361-6668/aa572a
Last Modified:	02 Feb 2018 13:12
URI:	https://eprintspublications.npl.co.uk/id/eprint/7514