Hao, L; Gallop, J C; Stewart, M; Lees, K; Chen, J* (2013) Multi-functional MEMS/NEMS for nanometrology applications. In: 13th IEEE International Conference on Nanotechnology (IEEE-NANO), 5-8 August 2013, Beijing, China.
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Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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Subjects: | Quantum Phenomena Quantum Phenomena > Nanophysics |
Identification number/DOI: | 10.1109/NANO.2013.6721047 |
Last Modified: | 02 Feb 2018 13:14 |
URI: | http://eprintspublications.npl.co.uk/id/eprint/6144 |
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