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Multi-functional MEMS/NEMS for nanometrology applications.

Hao, L; Gallop, J C; Stewart, M; Lees, K; Chen, J* (2013) Multi-functional MEMS/NEMS for nanometrology applications. In: 13th IEEE International Conference on Nanotechnology (IEEE-NANO), 5-8 August 2013, Beijing, China.

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Abstract

No abstract available

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Quantum Phenomena
Quantum Phenomena > Nanophysics
Identification number/DOI: 10.1109/NANO.2013.6721047
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/6144

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