Hao, L; Gallop, J C; Stewart, M; Lees, K; Chen, J* (2013) Multi-functional MEMS/NEMS for nanometrology applications. In: 13th IEEE International Conference on Nanotechnology (IEEE-NANO), 5-8 August 2013, Beijing, China.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Subjects:	Quantum Phenomena Quantum Phenomena > Nanophysics
Identification number/DOI:	10.1109/NANO.2013.6721047
Last Modified:	02 Feb 2018 13:14
URI:	http://eprintspublications.npl.co.uk/id/eprint/6144

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