Fernandez-Cuesta, I*; Borrise, X*; Retolaza, A*; Merino, S*; Mendels, D A; Hansen, O*; Kristensen, A*; Perez-Murano, F* (2008) Determination of stress build-up during nanoimprint process in triangular polymer structures. Microelectron. Eng., 85 (5-6). pp. 838-841.

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Item Type:	Article
Subjects:	Advanced Materials Advanced Materials > Polymers
Last Modified:	02 Feb 2018 13:15
URI:	http://eprintspublications.npl.co.uk/id/eprint/5074

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