Wain, A J; Zhou, S; Cox, D; Turnbull, A (2010) Novel focused ion beam-milled probes for combined scanning electrochemical microscopy - atomic force microscopy. NPL Report. MAT 48

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Abstract

A novel approach to the fabrication of dual function probes for combined scanning electrochemical microscopy - atomic force microscopy (SECM-AFM) is described. Silicon nitride AFM probes were machined using a focused ion beam (FIB) procedure to produce a 100 nm aperture through the apex of the tip. Subsequent filling of the aperture with platinum using beam-assisted metal deposition yielded a platinum nano-electrode at the tip apex. Insulation of the reverse side of the cantilever was achieved using beam-assisted tetraethyl orthosilicate (TEOS) deposition.

Item Type:	Report/Guide (NPL Report)
NPL Report No.:	MAT 48
Subjects:	Advanced Materials Advanced Materials > Electrochemistry
Last Modified:	02 Feb 2018 13:14
URI:	http://eprintspublications.npl.co.uk/id/eprint/4767

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