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Focussed ion beam NanoSQUIDs as novel NEMS resonator readout.

Hao, L; Gallop, J C; Cox, D; Romans, E J*; Macfarlane, J C*; Chen, J* (2009) Focussed ion beam NanoSQUIDs as novel NEMS resonator readout. IEEE Trans. Appl. Supercond., 19 (3). pp. 693-696.

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Nano electromechanical systems (NEMS) represent an important new class of device with wide ranging applications. As electromechanical system devices become smaller, approaching the nanoscale, the oscillation displacement amplitude scales down in proportion to size. Thus ultra-sensitive transducer techniques and low dissipation excitation schemes are needed to operate NEMS sensors. Developing suitable excitation and readout methods is crucial and may have spin-offs into a number of other nanotechnology applications. We propose here a novel form of NEMS displacement readout provided by our on-going development of nanoSQUIDs [1]. A focussed ion beam SQUID structure is fabricated on the same chip as the NEMS resonator. The vibration of the cantilever modulates the inductance of the nanoSQUID loop allowing sub picometre amplitude sensitivity to be achieved, according to our model results. We present detailed calculations of the performance of these readout methods and also preliminary device fabrication details.

Item Type: Article
Keywords: NEMS, NanoSQUIDs, Mechanical resonators
Subjects: Quantum Phenomena
Quantum Phenomena > Nanophysics
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4476

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