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Monitoring MEMS motion under vacuum.

Lowe, M (2007) Monitoring MEMS motion under vacuum. In Focus (1). p. 4.

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An environmental chamber integrated with a polytec MSA-400 micro-scanning laser doppler vibrometer for use in characterising MEMS devices.

Item Type: Article
Keywords: MEMS, Vibrometry
Subjects: Nanoscience
Nanoscience > Nano-Materials
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/3898

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