Lowe, M (2007) Monitoring MEMS motion under vacuum. In Focus (1). p. 4.

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Abstract

An environmental chamber integrated with a polytec MSA-400 micro-scanning laser doppler vibrometer for use in characterising MEMS devices.

Item Type:	Article
Keywords:	MEMS, Vibrometry
Subjects:	Nanoscience Nanoscience > Nano-Materials
Last Modified:	02 Feb 2018 13:15
URI:	https://eprintspublications.npl.co.uk/id/eprint/3898