Seah, M P (2005) Ultrathin SiO2 on Si, VI:evaluation of uncertainties in thickness measurement using XPS. Surf. Interface Anal., 37. pp. 300-309.

Full text not available from this repository.

Abstract

No abstract available

Item Type:	Article
Keywords:	ARXPS, gat oxides, silicon dioxide
Subjects:	Nanoscience Nanoscience > Surface and Nanoanalysis
Last Modified:	02 Feb 2018 13:16
URI:	http://eprintspublications.npl.co.uk/id/eprint/3363

Actions (login required)

View Item