Seah, M P; Clifford, C A; Green, F M; Gilmore, I S (2005) An accurate semi-empirical equation for sputtering yields, I: for argon ions. Surf. Interface Anal., 37. pp. 444-458.

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Abstract

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Item Type:	Article
Keywords:	crater measurements, polyatomic sputtering, sputter depth profiling
Subjects:	Nanoscience Nanoscience > Surface and Nanoanalysis
Last Modified:	02 Feb 2018 13:16
URI:	http://eprintspublications.npl.co.uk/id/eprint/3362

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