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Near surface strain measurements on quartz wafers and devices.

Broughton, W R; Fry, A T; Mendels, D A; Chunnilall, C J (2003) Near surface strain measurements on quartz wafers and devices. NPL Report. MATC(MN)52

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Abstract

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Item Type: Report/Guide (NPL Report)
NPL Report No.: MATC(MN)52
Keywords: electronic speckle pattern interferometry, Raman spectroscopy, x-ray diffraction
Subjects: Advanced Materials
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/2747

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