Broughton, W R; Fry, A T; Mendels, D A; Chunnilall, C J (2003) Near surface strain measurements on quartz wafers and devices. NPL Report. MATC(MN)52
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Abstract
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Item Type: | Report/Guide (NPL Report) |
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NPL Report No.: | MATC(MN)52 |
Keywords: | electronic speckle pattern interferometry, Raman spectroscopy, x-ray diffraction |
Subjects: | Advanced Materials |
Last Modified: | 02 Feb 2018 13:16 |
URI: | http://eprintspublications.npl.co.uk/id/eprint/2747 |
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