Leach, R K (2003) Metrology and testing for micro- to nano-technology: a wish list with associated problems. In: Proceedings of euspen Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment, 19-20 May 2003, Aachen, Germany.

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Abstract

The current status of metrology in the micro- and nanotechnology industries is examined; the conclusion is that research work in to standardisation and metrology is necessary to allow these industries to advance and reduce the cost of manufacture at such tiny scales. Several studies have reported on the current and future requirements for micro and nanometrology - these are combined into the author's 'wish list' for future research activity. Although this process is not as detailed as that required to develop a technology 'roadmap', it does present the selection of milestones that will need to be passed, on the way to the future success of micro- and nanotechnology.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Subjects:	Nanoscience Nanoscience > Nano-Dimensional
Last Modified:	02 Feb 2018 13:16
URI:	http://eprintspublications.npl.co.uk/id/eprint/2686

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