Seah, M P; Spencer, S J (2003) Ultrathin Sio2 on Si. I quantifying and removing carbonaceous contamination. J. Vac. Sci. Technol. A, 21 (2). pp. 345-352.

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Item Type:	Article
Subjects:	Analytical Science Analytical Science > Trace Analysis and Electrochemistry
Last Modified:	23 Jul 2018 12:45
URI:	https://eprintspublications.npl.co.uk/id/eprint/2598