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Metrology and testing of micro- and nano-systems: current situation and future needs.

Leach, R K (2003) Metrology and testing of micro- and nano-systems: current situation and future needs. In: Proceedings of euspen Conference "Transferring Micro-systems Technology Through the Commercial Markets", 14-15 April 2003, NPL, UK.

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Abstract

It is asserted that, as with macro-scale engineering and production, the key to the successful manufacture of tiny devices is proper process control using various metrology tools, without which, usable yields will be low, failure modes poorly understood and fatigue rates high. The dimensional metrology that is, and will continue to be, required to enhance the commercial viability and quality of micro- and nano-scale components and systems are discussed. The instruments available for (mainly dimensional) metrology of micro- and nano-scale structures and problems associated with their use are also discussed. Some advances at the National Physical Laboratory, UK are presented and the future needs of this rapidly advancing area of metrology discussed.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Nanoscience
Nanoscience > Nano-Dimensional
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/2587

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