Leach, R K (2001) NanoSurf IV: Traceable measurement of surface texture at the National Physical Laboratory, UK. Int. J. Mach. Tools Manuf. (UK), 41 (13-14). pp. 2113-2121.

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Abstract

A new surface texture measuring instrument, NanoSurf IV, has been developed at the National Physical Laboratory. Laser interferometers provide traceable displacement measurements in both the vertical and scanning axes enabling surface texture to be measured with nanometer uncertainty. Provided the fidelity of the surface-probe interaction is ensured, NanoSurf IV measures the co-ordinate of a pint on the surface. The instrument is designed primarily to calibrate surface texture standard specimens that can in-turn be used to calibrate other instruments. The design of the instrument, its calibration and results obtained from surface texture calibration artefacts are presented.

Item Type:	Article
Keywords:	surface texture, traceability
Subjects:	Nanoscience Nanoscience > Nano-Dimensional
Last Modified:	02 Feb 2018 13:17
URI:	https://eprintspublications.npl.co.uk/id/eprint/2001