Shard, A G; Reed, B P; Cant, D J H (2025) Surface Analysis Insight Note: Uncertainties in XPS Elemental Quantification. Surface and Interface Analysis, 57 (6). pp. 389-395. ISSN 0142-2421

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Abstract

X‐ray photoelectron spectroscopy (XPS) is routinely employed to measure surface compositions. The standard approach to quantification treats the surface region as if it is homogeneous and applies sensitivity factors to measured peak intensities to calculate the ‘equivalent‐homogeneous composition’ of the sample expressed as a mole fraction, which is usually converted to atomic percent. In this insight note, we briefly summarise the main contributions to uncertainty in XPS composition measurements and provide expressions through which the uncertainty in the measured composition can be estimated and reported.

Item Type:	Article
Keywords:	XPS, uncertainty
Subjects:	Nanoscience > Surface and Nanoanalysis
Divisions:	Chemical & Biological Sciences
Identification number/DOI:	10.1002/sia.7398
Last Modified:	19 May 2026 10:22
URI:	https://eprintspublications.npl.co.uk/id/eprint/10412