Tong, V; Mingard, K P; Adamski, F; Beausir, B; Bruckbauer, J; Cios, G; Dingley, D; Fullwood, D; Kalacska, S; Koko, A; McLean, M; Osborn, W; Radi, N; Schwedt, A; Shi, Q; Stacey, B; Wang, Y; Winklemann, A (2026) Interlaboratory comparison of strain measurement by high resolution electron backscatter diffraction. NPL Report. MAT 137

Preview

Text (NPL Report MAT 137) MAT137.pdf - Published Version Download (2MB) | Preview

Abstract

An interlaboratory comparison (ILC) has been conducted to evaluate the data analysis uncertainty component from High angular Resolution Electron BackScatter Diffraction (HR-EBSD) elastic strain measurements. Fourteen participants in the ILC performed HR-EBSD analysis on identical sets of data acquired at NPL and NIST, from a Si-SiGe candidate reference material with independently measured tetragonal elastic strains. The elastic strain uncertainty is ± 10-4 in unstrained crystal and ± 10-3 in strained crystal, and is dominated by systematic errors in pattern centre location. Recommendations are given for how to measure and report strain uncertainty in HR-EBSD, as well as potential topics and design of follow-on ILCs.

Item Type:	Report/Guide (NPL Report)
NPL Report No.:	MAT 137
Keywords:	EBSD, strain measurement
Subjects:	Advanced Materials > Microstructural Characterisation
Divisions:	Materials and Mechanical Metrology
Identification number/DOI:	10.47120/npl.MAT137
Last Modified:	20 Mar 2026 11:24
URI:	https://eprintspublications.npl.co.uk/id/eprint/10335